Moveable and adjustable gas injectors for an etching chamber

ABSTRACT

An apparatus for increasing the uniformity in a critical dimension of chemical vapor deposition and etching during substrate processing, comprising a plurality of gas injectors for admitting a processing gas into an etching chamber. Each gas injector of the plurality of gas injectors is disposed along a track within the etching chamber and moveable along the track. Further, each gas injector is coupled with a throttling valve or nozzle to permit adjustment of processing gas flow rate. A method for increasing the uniformity in a critical dimension of chemical vapor deposition and etching during substrate processing includes performing a chemical deposition or etch using the plurality of moveable and adjustable gas injectors and measuring the critical dimension uniformity. Adjustments to the location of at least one gas injector or the processing gas flow rate to at least one gas injector are made to increase critical dimension uniformity.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application Ser.No. 61/777,282, filed Mar. 12, 2013, which is expressly incorporatedherein by reference in its entirety

FIELD

The present disclosure generally relates to semiconductor fabrication.More particularly, the present disclosure relates to gas injectors usedin the etching chambers of semiconductor fabrication equipment.

BACKGROUND

A photomask is used during the manufacture of an integrated circuit (IC)to transfer the design of each chip layer onto a semiconductorsubstrate. Since a photomask contains the pattern for a single layer ofthe chip, a set of 15 to 30 photomasks is typically used in theconstruction of a chip. Photomasks are reusable and typically comprise asubstrate, a reflective layer, and an absorber layer.

Extreme ultraviolet (EUV) lithography is a promising new patterningtechnology for producing very small (i.e. −14 nm) chips. EUVlithography, like optical lithography, uses a set of photomasks whichreflect EUV light to form a patterned photoresist on a semiconductorsubstrate.

Photomasks for EUV lithography are generally manufactured by etching thechip layer pattern into the photomask. This process has a low tolerancefor error, since any defects in the photomask will be transferred to thesemiconductor substrate during EUV lithography. To manufacture aphotomask, a substrate (e.g., quartz) is typically etched in an etchingchamber wherein a photomask can be exposed to various processing gassesand plasmas.

Within the etching chamber it is desired to achieve a uniformdistribution of gas to ensure proper etching of the substrate.Uniformity of gas distribution is affected by the internal dynamics of aplasma etching chamber. Uneven gas distribution within the chambercreates unwanted variations in substrate fabrication, known as “processfingerprints.” These process fingerprints can damage device structures,leading to degraded chip performance or, in extreme cases, an unusablechip.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read in conjunction with the accompanying drawings. Itis emphasized that, according to common practice, the various featuresof the drawings are not necessarily to scale. On the contrary, thedimensions of the various features are arbitrarily expanded or reducedfor clarity. Like numerals denote like features throughout specificationand drawing.

FIG. 1 is a schematic cross-section view of an etching chambercontaining moveable and adjustable gas injectors in accordance with someembodiments of the present disclosure.

FIG. 2 is a top schematic view of a gas injector module within anetching chamber in accordance with some embodiments of the presentdisclosure.

FIG. 3 is an elevated side schematic view of an etching chambercontaining moveable and adjustable gas injectors in accordance with someembodiments of the present disclosure.

FIG. 4A is a schematic cross-section view of a moveable and adjustablegas injector within a track in accordance with some embodiments of thepresent disclosure.

FIG. 4B is a schematic side view of a stepper motor gear of a moveableand adjustable gas injector engaged with a toothed track in accordancewith some embodiments of the present disclosure

FIG. 5A is a connection diagram of a moveable and adjustable gasinjector in accordance with some embodiments.

FIG. 5B is a connection diagram of a moveable and adjustable gasinjector in accordance with some embodiments.

FIG. 6 is a flow diagram of a method in accordance with someembodiments.

DETAILED DESCRIPTION

This description of the exemplary embodiments is intended to be read inconnection with the accompanying drawings, which are to be consideredpart of the entire written description. In the description, relativeterms such as “lower,” “upper,” “horizontal,” “vertical,”, “above,”“below,” “up,” “down,” “top” and “bottom” as well as derivative thereof(e.g., “horizontally,” “downwardly,” “upwardly,” etc.) should beconstrued to refer to the orientation as then described or as shown inthe drawing under discussion. These relative terms are for convenienceof description and do not require that the apparatus be constructed oroperated in a particular orientation. Terms concerning attachments,coupling and the like, such as “connected” and “interconnected,” referto a relationship wherein structures are secured or attached to oneanother either directly or indirectly through intervening structures, aswell as both movable or rigid attachments or relationships, unlessexpressly described otherwise.

The present disclosure provides an apparatus comprising a plurality ofgas injectors moveably connected to a track fitted within an etchingchamber. In some embodiments, the track is circular. A method isdisclosed comprising performing an etch on a substrate using a pluralityof moveable and adjustable gas injectors and measuring the uniformity ofa critical dimension (CD) of the substrate. The apparatus and method areprovided to adjust the location and flow rate of processing gasesadmitted to the etching chamber, which will increase uniformity of gasdistributed or plasma formed within the etching chamber and ultimatelyincrease the uniformity of substrates etched within the chamber.

FIG. 1 is a schematic cross-section view of one example of an etchingchamber 100 containing a plurality of gas injectors 18 in accordancewith some embodiments of the present disclosure. In some embodiments, asshown in FIG. 1, the exemplary etching chamber 100 is generallycylindrical in shape with the etching chamber housing 12 forming anupper chamber cavity 20 and lower chamber cavity 10.

A substrate 24 which is to undergo etching rests on a pedestal 26 withinthe lower chamber cavity 10. In some embodiments, the substrate 24 is arectangular quartz substrate for a photomask, over which a MoSimulti-layer reflector and a chrome or tantalum absorber are to beformed. In other embodiments, the substrate 24 is a circularsemiconductor wafer.

The pedestal 26 is connected to the etching chamber housing 12. In someembodiments, the etching chamber 100 is generally rectangular in shape.

Fitted within and connected to etching chamber housing 12 is a gasinjector module 28. The gas injector module 28 is a gas distributionapparatus, configured to provide processing gas into the lower chambercavity 10 of etching chamber 100. The gas injector module comprises aninner track 16, outer track 14, and a plurality of gas injectors 18. Gasinjector module 28 divides the etching chamber 100 into an upper chambercavity 20 and lower chamber cavity 10. Outer track 14 is connected toetching chamber housing 12. Inner track 16 is connected to the etchingchamber housing 12 by at least one support bracket 32. A plurality ofgas injectors 18 are disposed between the inner track 16 and outer track14 in a manner that allows the injector's locations to be adjusted bymoving the injectors 18 laterally along the track. In the example, gasinjector module 28 is disposed over pedestal 26. In other embodiments,the etching chamber 100 is oriented horizontally (i.e., rotated 90degrees from the position in FIG. 1).

Each gas injector 18 is connected to a flexible hose 22 which passesthrough etching chamber housing 12 and provides at least one chemical ina gas state from a gas source located outside the etching chamber 100.In some embodiments, the gas source provides two or more chemicals in agas state. Electrical wiring for communicating with a gas injector 18can also be run alongside flexible hose 22. This wiring connects eachgas injector with a first controller 48.

Etching chamber housing 12 includes at least one exhaust port 38connecting to at least one vacuum chamber 40. During most uses ofetching chamber 100, a vacuum is formed in the etching chamber 100 anddesorbed species formed during the etching process are expelled viaexhaust port 38.

In some embodiments, etching chamber 100 additionally includes at leastone electrode 34, which is connected to a high frequency electric powersupply 36. In some embodiments, processing gases admitted to the etchingchamber 100 contact the energized electrode to form plasma for a plasmaetching process.

In some embodiments, pedestal 26 comprises an electro-static chuck,vacuum system, clamp or other apparatus that is able to fix thesubstrate 24 on the pedestal 26. The etching chamber 100 can be used toperform a gas etch or a plasma etch on a mask, wafer, or similarworkpiece. In some embodiments, pedestal 26 further comprises a bottomelectrode coupled to a power supply to enhance plasma within the etchingchamber 100. Alternatively, pedestal 26 is electrically grounded. Insome embodiments, pedestal 26 includes a plurality of support pins andthe substrate 24 rests on the support pins during processing. In someembodiments, pedestal 26 comprises a heater (not shown) for heating thesubstrate 24. The substrate 24 can be also heated by radiant heatingthrough a quartz window (not shown) at the bottom of etching chamber100.

In FIGS. 2 through 5, like items are indicated by like referencenumerals, and for brevity, descriptions of the structure, provided abovewith reference to FIG. 1, are not repeated.

FIG. 2 is a top schematic view of a gas injector module 28 within anetching chamber 100 in accordance with some embodiments of the presentdisclosure. The plurality of gas injectors 18 are disposed in a circularformation between inner track 16 and outer track 14. Outer track 14 isconnected to the etching chamber housing 12. Each of the plurality ofgas injectors is moveable along the circular track formed by inner track16 and outer track 14. For illustrative purposes, a substrate 24 ispictured within the lower chamber cavity 10, centered beneath theplurality of gas injectors 18.

By way of example, FIG. 2 illustrates twelve gas injectors 18 disposedwithin a circular track. The gas injectors 18 are shown evenly spacedalong the track, with a gap 30 between each gas injector 18 and theadjacent gas injector 18. A slot 46 which is used to insert or removegas injectors 18 to achieve a desirable number of gas injectors 18within etching chamber 100. As would be apparent to one of ordinaryskill in the art, there are many variations on this configuration. Forexample, some embodiments can have more or fewer gas injectors 18. Someembodiments can feature the gas injectors 18 disposed in several tracksaligned in rows or any number of additional shapes. As described infurther detail below, some embodiments can also have the gas injectors18 disposed at non-uniform distances from each other along the track.

FIG. 3 is an elevated side schematic view of an etching chamber 100,with the top portion of the chamber removed for illustrative purposes,in accordance with some embodiments of the present disclosure. FIG. 3further illustrates the configuration of the plurality of gas injectors18, inner track 16, outer track 14, and etching chamber housing 12 asdescribed above and as illustrated in FIGS. 1 and 2. A substrate 24 isagain pictured within the lower chamber cavity 10.

FIG. 4A is a schematic cross-section view of a gas injector 18 disposedwithin the track according to some embodiments of the present invention.A pair of protruding members 40 extend from gas injector 18. Protrudingmembers 40 are configured to slide laterally within a correspondinginner track groove 42 and outer track groove 44. Protruding members 40additionally serve to hold gas injector 18 securely within the gap 30formed by inner track 16 and outer track 14. Protruding members 40 canassume a variety of shapes and sizes. In some embodiments, protrudingmembers 40 are small wheels that facilitate smooth lateral motion of thegas injector 18 along the track.

FIG. 4A further illustrates the means for changing the location of a gasinjector 18. Each gas injector 18 is topped with a stepper motor 56which comprises multiple toothed electromagnets arranged around acentral gear. Stepper motor 56 is mechanically connected to a toothedwheel 60, which is engaged with a row of teeth 58 disposed along theedge of inner track 16. FIG. 4B further illustrates the engagement oftoothed wheel 60 and teeth 58. Stepper motor 56 receives signals fromfirst controller 48 to change or maintain its location.

In some embodiments, each adjustable gas injector 18 is suspended froman actuator comprising a worm drive (not pictured). For example, thetrack can have a worm (which is a gear in the form of a threadedmember), and the actuator has a worm gear that meshes with the worm onthe track. Each actuator has an independently operable, reversible motorfor rotating that actuator's worm gear, causing the actuator to movealong the track.

The interior of a plasma chamber is a highly corrosive environment. Assuch, the components described herein are preferably constructed ofmaterials which resist corrosion. For example, the plurality of gasinjectors 18 can be made of ceramic. The inner track 16 and outer track14 can be made of metal with a protective, anti-corrosive coating. Othersuitable materials include anodized aluminum, aluminum alloy, ceramic,and other corrosion resistant materials.

FIGS. 5A and 5B are connection diagrams of the processing gas supplysystem of the disclosed apparatus according to some embodiments. Asdescribed above, the disclosed apparatus is an adjustable gas injectorin that it can control the flow rate of a chemical in a gas state to beused for creating plasma within the etching chamber 100. In some cases,the flow rate of processing gas into the chamber is varied to allow formore uniform gas distribution or more uniform plasma formation anddistribution.

In FIG. 5A, the flow rate is controlled by a control valve 54 which isconnected to a gas source 50. Control valve 54 is anelectronically-controlled throttle valve that is connectedelectronically to second controller 52. Second controller 52 sendssignals, also referred to as orders, via the electric connectionordering changes in processing gas flow rate for the associated gasinjector 18, and control valve 54 adjusts the processing gas flow rateaccordingly via throttling. If needed or desired, the control valve 54can also be completely shut to secure all processing gas flow.

In FIG. 5B, the flow rate is controlled directly at the gas injector 18by second controller 52. Gas injector 18 is connected to gas source 50and electrically connected to second controller 52. Gas injector 18 cancontain an internal throttle valve, adjustable nozzle, or other means ofcontrolling processing gas flow rate. Second controller 52 sends signalsvia the electric connection ordering changes in processing gas flow ratefor the associated gas injector 18, and gas injector 18 adjusts theprocessing gas flow rate accordingly. If needed or desired, the gasinjector 18 can also be completely shut to secure all processing gasflow.

In still further embodiments, second controller 52 is electricallyconnected to both a control valve 54 and gas injector 18, with oneserving as a primary means for controlling processing gas flow rate andthe other serving as a secondary or back-up means.

A single second controller 52 is provided to control the processing gasflow rates at each of the plurality of gas injectors 18. In someembodiments, a plurality of second controllers 52 are provided, each ofthe plurality of second controllers 52 associated with one of theplurality of gas injectors 18. Second controller 52 can be connected toa human-machine interface, such as a computer or a control panel, or itcan be operated automatically by a semiconductor manufacturing computerthat controls the etching process. The second controller 52 can be, forexample, a central processing unit (CPU), a microprocessor, aprogrammable logic control unit, a computer or other device or systemthat is adapted to control respective processing gas flow rate inrespective gas injectors 18.

First controller 48 controls the location of each of the plurality ofgas injectors 18. Second controller 52 controls the processing gas flowrates at each of the plurality of gas injectors 18. In some embodiments,first controller 48 and second controller 52 are combined into a singlecontroller which can be, for example, a central processing unit (CPU), amicroprocessor, a programmable logic control unit, a computer or otherdevice or system that is adapted to control the location and respectiveprocessing gas flow rate in respective gas injectors 18.

First controller 48 and second controller 52 include a user interface,allowing a worker using the etching chamber described herein to controlthe location and processing gas flow rate of the plurality of gasinjectors. The worker monitors uniformity of a critical dimension (CD)as substrates are processed and adjusts the location and/or theprocessing gas flow rate to improve CD uniformity.

Monitoring of the CD is performed on every substrate followingprocessing in the plasma chamber, or is performed at various intervals.Monitoring the CD uniformity of substrates as they are processed allowsa worker to establish processing trends and adjust system parametersaccordingly. In some embodiments, monitoring of the CD is performed insitu, without removing the substrate from the etching chamber. Thus, thelocation and professing gas flow rate of the plurality of gas injectorscan be dynamically adjusted as the substrate is etched.

The present disclosure further provides a method for increasing the CDuniformity during substrate processing. FIG. 6 is a flow diagram of amethod in accordance with some embodiments. After process 600 begins atblock 602, a first etch is performed on a first substrate using anetching chamber which includes a plurality of moveable and adjustablegas injectors at block 604. At block 606, the CD uniformity of the firstsubstrate is measured. As would be known to one of skill in the art,various dimensions of the substrate can be measured when performing thedisclosed method. CD uniformity is used herein for illustrativepurposes; however, the disclosed method is not limited to measuring andadjusting for CD uniformity.

At block 608, the location of at least one of the plurality of gasinjectors is adjusted to increase CD uniformity. At block 610, the flowrate of processing gas to at least one of the plurality of gas injectorsis adjusted to increase CD uniformity. In some embodiments, the locationof a gas injector can be adjusted, the flow rate of processing gas to agas injector can be adjusted, or both the location and flow rate ofprocessing gas to a gas injector can be adjusted to at least one gasinjector.

At blocks 612 and 614, following adjustments made at blocks 608 and 610,a second etch of a second substrate is performed and the CD uniformityis measured. The process ends at block 616.

The moveable and adjustable gas injectors described above have severaladvantages. First, the uniformity of gas or plasma distribution can beimproved by relocating each of a plurality of gas injectors along acircular track within the etching chamber. Second, gas and plasmauniformity can also be improved by adjusting the flow rate of sourcegases entering the etching chamber. As a result, a more uniform gas orplasma distribution is achieved within the etching chamber, and theetching process performed on a substrate is more uniform thus increasingthe CD uniformity.

The moveable and adjustable gas injectors described above are applicableto the manufacture of photomasks, such as those used in opticallithography, EUV lithography, electron projection lithography, ionprojection lithography, X-ray lithography, or nanoimprint. The variousembodiments of moveable and adjustable gas injectors described above arealso generally applicable to a variety of other processes, such as butnot limited to, plasma etching, chemical vapor deposition (CVD), plasmaenhanced CVD (PECVD), physical vapor deposition (PVD) or atomic layerdeposition (ALD) and other semiconductor fabrication processes. Examplesof related applications include but are not limited to formation offilms of shallow trench isolation (STI), advanced patternedfilm/antireflective coating (APF/ARC) oxide, and low dielectric constantmaterials.

The processing gas can be, for example, a pure chemical gas, a mixedchemical gas, a mist or moisture of chemical, an ionized gas comprisingplasma, a mixture of gas comprising liquid drops, or any other type ofchemicals suitable for a semiconductor process for deposition oretching. Substrate 24 can be, for example, a photomask, a semiconductorwafer, a silicon substrate, a III-V semiconductor compound, a glasssubstrate, a liquid crystal display (LCD) substrate, or any othersuitable substrate. In some embodiments, substrate 24 is a blanksubstrate or comprises a variety of integrated devices or circuits, orlayers of forming such devices or circuits.

Although examples are illustrated and described herein, embodiments arenevertheless not limited to the details shown, since variousmodifications and structural changes can be made therein by those ofordinary skill within the scope and range of equivalents of the claims.

In some embodiments, an apparatus comprises an etching chamber fordelivering a processing gas to a substrate within the etching chamber; atrack within the etching chamber; and a plurality of gas injectors foradmitting a processing gas into the etching chamber, each gas injectordisposed along the track within said etching chamber and moveable alongsaid track.

In some embodiments each respective gas injector is coupled to arespective valve to allow the adjustment of a flow rate of a processinggas.

In some embodiments apparatus further comprises a plurality of flexiblehoses connected to the plurality of gas injectors for supplying aprocessing gas to the gas injectors.

In some embodiments the plurality of gas injectors are disposed withinan inner track and an outer track and moveable within the gap bounded bythe inner track and the outer track and each gas injector of theplurality of gas injectors has at least one protruding member configuredto slide laterally within a track groove.

In some embodiments the apparatus further comprises a controller forcontrolling the respective flow rate of the processing gas through eachrespective one of the plurality of gas injectors; an electric connectorfrom said controller to said gas injector valve; and a source of theprocessing gas.

In some embodiments each gas injector has a respective actuator,including a respective motor and a respective gear, configured to movethat gas injector along the track.

In some embodiments, an apparatus comprises an etching chamber housingdefining a chamber cavity; a gas injector module mounted within thechamber cavity, the gas injector module comprising a plurality ofplurality of gas injectors disposed within an inner track and an outertrack and moveable within the gap bounded by the inner track and theouter track.

In some embodiments each respective gas injector is coupled to arespective valve to allow the adjustment of the flow rate of aprocessing gas.

In some embodiments the apparatus further comprises a plurality offlexible hoses connected to the plurality of gas injectors for supplyinga processing gas to said gas injectors.

In some embodiments each gas injector of the plurality of gas injectorshas at least one protruding member configured to slide laterally withina track groove.

In some embodiments the apparatus further comprises a controller forcontrolling the respective flow rate of the processing gas through eachrespective one of the plurality of gas injectors; an electric connectorfrom the controller to the gas injector valve; and a source of theprocessing gas.

In some embodiments each gas injector has a respective actuator,including a respective motor and a respective gear, configured to movethat gas injector along the track.

In some embodiments the apparatus further comprises a controller whichcontrols the location of the gas injector by sending orders to theactuator and the motor.

In some embodiments, a method comprises the steps of performing a firstetch on a first substrate using an etching chamber which includes aplurality of moveable and adjustable gas injectors; measuring adimension at a plurality of locations on the first substrate; andadjusting at least one of a position or a gas flow rate of at least oneof the adjustable gas injectors based on the measuring.

In some embodiments the measuring a dimension is performed withoutremoving the first substrate from the etching chamber.

In some embodiments the adjusting step includes adjusting either thelocation of at least one of a plurality of gas injectors or the flowrate of processing gas to at least one of a plurality of gas injectorsso as to increase uniformity of the measured dimension.

In some embodiments the adjusting step is performed dynamically whilethe substrate in undergoing etching.

In some embodiments the adjusting step is performed automatically by acontroller.

In some embodiments the method further comprises performing a secondetch on a second substrate after adjusting either the location of atleast one of a plurality of gas injectors or the flow rate of processinggas to at least one of a plurality of gas injectors; and measuring thedimension at a plurality of locations on the second substrate.

In some embodiments the method further comprises adjusting the locationat least one of a plurality of gas injectors so as to increaseuniformity of the dimension; adjusting the flow rate of processing gasto at least one of a plurality of gas injectors so as to increase theuniformity of the dimension; performing a second etch on a secondsubstrate using the plurality of gas injectors with at least oneadjusted gas injector location and at least one adjusted flow rate ofprocessing gas; and measuring the dimension at a plurality of locationson the second substrate.

The methods and system described herein may be at least partiallyembodied in the form of computer-implemented processes and apparatus forpracticing those processes. The disclosed methods may also be at leastpartially embodied in the form of tangible, non-transient machinereadable storage media encoded with computer program code. The media mayinclude, for example, RAMs, ROMs, CD-ROMs, DVD-ROMs, BD-ROMs, hard diskdrives, flash memories, or any other non-transient machine-readablestorage medium, wherein, when the computer program code is loaded intoand executed by a computer, the computer becomes an apparatus forpracticing the method. The methods may also be at least partiallyembodied in the form of a computer into which computer program code isloaded and/or executed, such that, the computer becomes a specialpurpose computer for practicing the methods. When implemented on ageneral-purpose processor, the computer program code segments configurethe processor to create specific logic circuits. The methods mayalternatively be at least partially embodied in a digital signalprocessor formed of application specific integrated circuits forperforming the methods.

Although examples are illustrated and described herein, embodiments arenevertheless not limited to the details shown, since variousmodifications and structural changes can be made therein by those ofordinary skill within the scope and range of equivalents of the claims.

What is claimed is:
 1. An apparatus for delivering a processing gas to asubstrate, comprising: an etching chamber; and a circular gas injectormodule disposed within the etching chamber comprising an inner track, anouter track, and a plurality of gas injectors for admitting theprocessing gas into the etching chamber, each gas injector independentlymoveable between said inner track and said outer track.
 2. The apparatusof claim 1, wherein each gas injector of said plurality of gas injectorsis coupled to a respective valve to allow the adjustment of a flow rateof the processing gas.
 3. The apparatus of claim 2, wherein each gasinjector of said plurality of gas injectors has at least one protrudingmember configured to slide laterally within a track groove.
 4. Theapparatus of claim 2, further comprising: a controller for controllingthe respective flow rate of the processing gas through each respectiveone of the plurality of gas injectors; and a source of the processinggas.
 5. The apparatus of claim 1 wherein each gas injector has arespective actuator, including a respective motor and a respective gearalong said inner track, configured to move that gas injector.
 6. Anapparatus, comprising: an etching chamber housing defining a chambercavity; and a circular gas injector module mounted within said chambercavity, said gas injector module comprising a plurality of gas injectorsdisposed between an inner track and an outer track and independentlymoveable within a gap bounded by said inner track and said outer track,each of said plurality of gas injectors having an actuator along saidinner track or said outer track configured to move that gas injector. 7.The apparatus of claim 6, wherein each gas injector of said plurality ofgas injectors is coupled to a respective gas injector valve to allow theadjustment of the flow rate of a processing gas.
 8. The apparatus ofclaim 7, wherein each gas injector of said plurality of gas injectorshas at least one protruding member configured to slide laterally withina track groove.
 9. The apparatus of claim 7, further comprising: acontroller for controlling the respective flow rate of the processinggas through each respective one of the plurality of gas injectors; anelectric connector from said controller to said gas injector valve; anda source of the processing gas.
 10. The apparatus of claim 6, furthercomprising a controller which controls the location of said gas injectorby sending orders to said actuator.
 11. A system of substrateprocessing, comprising: an etching chamber comprising: an etchingchamber housing defining a chamber cavity; a pedestal mounted within thechamber cavity; and a circular gas injector module mounted within thechamber cavity comprising a plurality of gas injectors disposed betweenan inner track and an outer track and independently moveable betweensaid inner track and said outer track, wherein each of the plurality ofgas injectors is coupled to one of a plurality of flow rate adjustmentvalves; a controller, configured to control the flow rate of aprocessing gas into the chamber cavity by adjusting the flow rateadjustment valves; and a processing gas source connected to each of theplurality of gas injectors.
 12. The system of claim 11 wherein each gasinjector of said plurality of gas injectors has at least one protrudingmember configured to slide laterally within a track groove.
 13. Thesystem of claim 12 wherein each gas injector has a respective actuator,including a respective motor and a respective gear, configured to movethat gas injector along the inner track and the outer track.
 14. Thesystem of claim 13 wherein the controller controls the location of saidgas injector by sending orders to said actuator.
 15. The system of claim14 wherein the inner track and the outer track are each mounted withinthe chamber cavity by at least one support bracket.
 16. The system ofclaim 11, wherein the etching chamber further comprises at least oneelectrode mounted within the chamber cavity.
 17. The system of claim 11,wherein the etching chamber further comprises at least one exhaust portconnected to a vacuum chamber.
 18. The system of claim 11, furthercomprising a user interface connected to the controller.
 19. The systemof claim 11 wherein the pedestal is electrically grounded.